Fabrication : Dry Etching

Why Do we Need Dry Etching

(1) 更小的feature size

(2) 非等向性的蝕刻

下圖比較(Comparison)各種Dry Etching Techniques 所需要的條件(Conditions) 以及環境(Environmental)

原文轉自:
http://www.mrsec.harvard.edu/education/ap298r2004/Erli%20chen%20Fabrication%20III%20-%20Etching.pdf