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Friday, March 23, 2012
Fabrication : Etching - Overetch is useful
一般來說Overetch 可能會侵蝕到原本不想蝕刻的地方, 導致Pattern distortion. 不過有時候倒是能夠利用Overetch 底下的面積, 來縮減Pattern間的間隙. This is called controlled overetch. 以下按例附圖XD
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